Applications

Semiconductor

High-purity graphite parts for equipment and process chambers.

Semiconductor process equipment lives within contamination budgets measured in parts per million. Graphite is there for its combination of purity, thermal shock resistance and stability — and every part is machined, cleaned and packaged to match the process it serves.

Why graphite here

Low contamination

Purified graphite with ash content in the single-digit ppm range.

Stable at temperature

Fixture and heater geometry stays put through thermal cycling.

Clean handling

Clean machining and protective packaging keep parts chamber-ready.

Typical parts we machine

heaters, susceptors, chamber liners, gas distribution parts, fixtures

Grades: isostatically pressed fine-grain graphite — selected per duty and confirmed with you before quoting.

Running this process?

Send us the drawing of the part you currently buy — we quote the machined equivalent, including material certificate.

Request a quotation